@inproceedings{205fa5cc14d148e4a0e1017414bc817c,
title = "Visualization of acoustic waves and cavitation in ultrasonic water flow",
abstract = "Visualization experiments were performed to examine whether acoustic bubbles play a role in ultrasonic water flow cleaning, as in convention cleaning with ultrasonic baths. Schlieren visualization confirmed the standing-wave-like acoustic field in ultrasonic water flow that collides with a glass surface. Backlight visualization showed that cavitation bubbles appear in the water flow spreading over the glass surface. These bubbles are found to oscillate in volume and move inside film flow and thus expected to play a role as active cleaning agents.",
keywords = "Acoustic cavitation, Bubble motion, Ultrasonic water flow cleaning",
author = "Hidehisa Usui and Tomoatsu Ishibashi and Hisanori Matsuo and Katsuhide Watanabe and Keita Ando",
note = "Publisher Copyright: {\textcopyright} 2021 Trans Tech Publications Ltd, Switzerland.; 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021 ; Conference date: 12-04-2021 Through 15-04-2021",
year = "2021",
doi = "10.4028/www.scientific.net/SSP.314.186",
language = "English",
isbn = "9783035738018",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "186--191",
editor = "Mertens, {Paul W.} and Kurt Wostyn and Marc Meuris and Marc Heyns",
booktitle = "Ultra Clean Processing of Semiconductor Surfaces XV - Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021",
}