Tanaka, S.,
Itai, S. &
Onoe, H.,
2023,
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc.,
p. 456-459 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2023-January).
研究成果: Conference contribution