Miyata, D., Masuda, A., Kagawa, G., Tani, H.,
Takahashi, H., Tohyama, S. &
Onoe, H.,
2025,
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc.,
p. 83-86 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
研究成果: Conference contribution