Kawamae, R., Takata, A.,
Takemura, K. & Kurashina, Y.,
2024,
IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Institute of Electrical and Electronics Engineers Inc.,
p. 334-335 2 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
研究成果: Conference contribution