Hashimoto, I., Osaki, T., Mimura, H., Takamori, S.,
Miki, N. & Takeuchi, S.,
2023,
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc.,
p. 279-280 2 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2023-January).
研究成果: Conference contribution