Kato, A.,
Oda, H.,
Takamori, S.,
Mimura, H.,
Osaki, T.,
Miki, N. &
Takeuchi, S.,
2023,
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc.,
p. 313-314 2 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2023-January).
研究成果: Conference contribution