A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

H. Takahashi; A. Isozaki; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2015.7051055

A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

H. Takahashi, A. Isozaki, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.

本文言語	English
ホスト出版物のタイトル	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	706-709
ページ数	4
版	February
ISBN（電子版）	9781479979554
DOI	https://doi.org/10.1109/MEMSYS.2015.7051055
出版ステータス	Published - 2015 2月 26
外部発表	はい
イベント	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal 継続期間: 2015 1月 18 → 2015 1月 22

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
番号	February
巻	2015-February
ISSN（印刷版）	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
国/地域	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMSYS.2015.7051055

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引用スタイル

Takahashi, H., Isozaki, A., Matsumoto, K., & Shimoyama, I. (2015). A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 706-709). 記事 7051055 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051055

A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. / Takahashi, H.; Isozaki, A.; Matsumoto, K. その他.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 706-709 7051055 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

研究成果: Conference contribution

Takahashi, H, Isozaki, A, Matsumoto, K & Shimoyama, I 2015, A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051055, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 706-709, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7051055

Takahashi H, Isozaki A, Matsumoto K, Shimoyama I. A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 706-709. 7051055. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051055

Takahashi, H. ; Isozaki, A. ; Matsumoto, K. その他. / A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 706-709 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

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