A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices

Yoshinori Matsumoto; Kazumasa Yoshida; Makoto Ishida

doi:10.1016/S0924-4247(97)01763-9

A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices

Yoshinori Matsumoto
, Kazumasa Yoshida
, Makoto Ishida

研究成果: Article › 査読

49 被引用数 (Scopus)

抄録

Several deposition techniques and the characteristics of fluorocarbon (FC) films have been investigated. First, FC film is spin-coated from cyclized perfluoro polymer (CPFP), commercialized as CYTOP. Because of its excellent durability for alkalis or acids, the FC film is used for protection of the circuit area of an integrated accelerometer from a silicon alkaline etching process by 25 wt.% TMAH at 90°C. Secondly, FC films are formed on a field-free zone with a capacitive-coupling-type plasma-polymerization equipment using perfluorinated liquids (C₇F₁₆, C₈F₁₈, etc.) as monomer species. The deposition rates and thermal stability of the films have been investigated. The FC films are effective for elimination of in-use stiction for surface-micromachined devices.

本文言語	English
ページ（範囲）	308-314
ページ数	7
ジャーナル	Sensors and Actuators, A: Physical
巻	66
号	1-3
DOI	https://doi.org/10.1016/S0924-4247(97)01763-9
出版ステータス	Published - 1998 4月 1
外部発表	はい

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
器械工学
凝縮系物理学
表面、皮膜および薄膜
金属および合金
電子工学および電気工学

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title = "A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices",

abstract = "Several deposition techniques and the characteristics of fluorocarbon (FC) films have been investigated. First, FC film is spin-coated from cyclized perfluoro polymer (CPFP), commercialized as CYTOP. Because of its excellent durability for alkalis or acids, the FC film is used for protection of the circuit area of an integrated accelerometer from a silicon alkaline etching process by 25 wt.\% TMAH at 90°C. Secondly, FC films are formed on a field-free zone with a capacitive-coupling-type plasma-polymerization equipment using perfluorinated liquids (C7F16, C8F18, etc.) as monomer species. The deposition rates and thermal stability of the films have been investigated. The FC films are effective for elimination of in-use stiction for surface-micromachined devices.",

keywords = "CYTOP, Fluorocarbon film, In-use stiction, Integrated sensors, Plasma polymerization",

author = "Yoshinori Matsumoto and Kazumasa Yoshida and Makoto Ishida",

note = "Funding Information: This work has been partly supported by the Japanese Ministry of Education, Science, Sports and Culture under a Grant-in-Aid for Encouragement of Young Scientists No.",

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AU - Matsumoto, Yoshinori

AU - Yoshida, Kazumasa

AU - Ishida, Makoto

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Y1 - 1998/4/1

N2 - Several deposition techniques and the characteristics of fluorocarbon (FC) films have been investigated. First, FC film is spin-coated from cyclized perfluoro polymer (CPFP), commercialized as CYTOP. Because of its excellent durability for alkalis or acids, the FC film is used for protection of the circuit area of an integrated accelerometer from a silicon alkaline etching process by 25 wt.% TMAH at 90°C. Secondly, FC films are formed on a field-free zone with a capacitive-coupling-type plasma-polymerization equipment using perfluorinated liquids (C7F16, C8F18, etc.) as monomer species. The deposition rates and thermal stability of the films have been investigated. The FC films are effective for elimination of in-use stiction for surface-micromachined devices.

AB - Several deposition techniques and the characteristics of fluorocarbon (FC) films have been investigated. First, FC film is spin-coated from cyclized perfluoro polymer (CPFP), commercialized as CYTOP. Because of its excellent durability for alkalis or acids, the FC film is used for protection of the circuit area of an integrated accelerometer from a silicon alkaline etching process by 25 wt.% TMAH at 90°C. Secondly, FC films are formed on a field-free zone with a capacitive-coupling-type plasma-polymerization equipment using perfluorinated liquids (C7F16, C8F18, etc.) as monomer species. The deposition rates and thermal stability of the films have been investigated. The FC films are effective for elimination of in-use stiction for surface-micromachined devices.

KW - CYTOP

KW - Fluorocarbon film

KW - In-use stiction

KW - Integrated sensors

KW - Plasma polymerization

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U2 - 10.1016/S0924-4247(97)01763-9

DO - 10.1016/S0924-4247(97)01763-9

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JO - Sensors and Actuators, A: Physical

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IS - 1-3

ER -

A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices

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