TY - JOUR
T1 - Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy
AU - Tochikubo, F.
AU - Makabe, T.
PY - 1991/12/1
Y1 - 1991/12/1
N2 - A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.
AB - A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.
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U2 - 10.1088/0957-0233/2/12/003
DO - 10.1088/0957-0233/2/12/003
M3 - Article
AN - SCOPUS:0026370170
SN - 0957-0233
VL - 2
SP - 1133
EP - 1137
JO - Measurement Science and Technology
JF - Measurement Science and Technology
IS - 12
M1 - 003
ER -