Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

Engineering & Materials Science

• Optical emission spectroscopy 100%
• Glow discharges 88%
• Ray tracing 69%
• Electrons 60%

Mathematics

• Spectroscopy 78%
• Excitation 61%
• Ray Tracing 42%
• Electron 30%
• Lifetime 30%
• Absolute value 29%

Physics & Astronomy

• optical emission spectroscopy 68%
• radiative lifetime 34%
• ray tracing 30%
• electron impact 29%
• glow discharges 29%
• excitation 29%