TY - JOUR
T1 - An integrated MOS magnetic sensor with chopper-stabilized amplifier
AU - Kawahito, Shoji
AU - Hayakawa, Kohji
AU - Matsumoto, Yoshinori
AU - Ishida, Mákoto
AU - Tadokoro, Yoshiaki
PY - 1996/12/1
Y1 - 1996/12/1
N2 - This paper describes an integrated MOS magnetic sensor with chopper-stabilized amplifier. The integrated magnetic sensor has been fabricated using the standard n-channel E/D(enhancement/depletion) MOS process technology. A sensing element with a dual-source dual-drain structure in the MOSFET suitable for the chopper driving has been developed, and is called split-source-drain MAGFET. A depletion-mode structure is used for the MAGFET to reduce the 1/f noise by applying a negative gate bias voltage. The integration of the chopper-stabilized amplifier with the silicon magnetic sensor leads to a reduction of the 1/f noise, the offset, and the offset drift of the amplifier, as well as to an enhancement of the equivalent sensitivity. The integrated magnetic sensor has a sensitivity of 5.5 V/T and the resolution of about 50 μT with 1 kHz bandwidth.
AB - This paper describes an integrated MOS magnetic sensor with chopper-stabilized amplifier. The integrated magnetic sensor has been fabricated using the standard n-channel E/D(enhancement/depletion) MOS process technology. A sensing element with a dual-source dual-drain structure in the MOSFET suitable for the chopper driving has been developed, and is called split-source-drain MAGFET. A depletion-mode structure is used for the MAGFET to reduce the 1/f noise by applying a negative gate bias voltage. The integration of the chopper-stabilized amplifier with the silicon magnetic sensor leads to a reduction of the 1/f noise, the offset, and the offset drift of the amplifier, as well as to an enhancement of the equivalent sensitivity. The integrated magnetic sensor has a sensitivity of 5.5 V/T and the resolution of about 50 μT with 1 kHz bandwidth.
KW - Chopper stabilization
KW - Integrated sensor
KW - Magnetic sensor
KW - Split-source-drain MAGFET
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M3 - Article
AN - SCOPUS:1542299446
SN - 0914-4935
VL - 8
SP - 1
EP - 12
JO - Sensors and Materials
JF - Sensors and Materials
IS - 1
ER -