Basic study on polishing technology for microcavity with electrically controlled slurry

Engineering & Materials Science

• Microcavities 100%
• Polishing 68%
• Abrasives 15%
• Calcium fluoride 13%
• Optical signal processing 12%
• Optical properties 9%
• Single crystals 8%
• Etching 8%
• Anisotropy 8%
• Electric potential 8%
• Surface properties 7%
• Crystals 7%
• Electric fields 7%

Chemical Compounds

• Polishing 71%
• Abrasive 19%
• Crystal Anisotropy 14%
• Voltage 11%
• Shape 10%
• Etching 6%
• Electric Field 6%
• Fluoride 6%
• Calcium(0) 5%
• Optical Property 5%
• Single Crystalline Solid 5%
• Time 2%
• Surface 2%
• Application 2%

Physics & Astronomy

• polishing 65%
• abrasives 18%
• alternating current 13%
• calcium fluorides 10%
• electric potential 8%
• signal processing 7%
• optical communication 6%
• etching 5%
• optical properties 5%
• anisotropy 4%
• single crystals 4%
• electric fields 4%
• crystals 3%
• performance 3%