Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

Bichitra Nanda Sahoo, So Young Han, Hyun Tae Kim, Keita Ando, Tae Gon Kim, Bong Kyun Kang, Andreas Klipp, Nagendra Prasad Yerriboina, Jin Goo Park

研究成果: Article › 査読

5 被引用数 (Scopus)

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Earth & Environmental Sciences

Physics & Astronomy

Engineering & Materials Science

Medicine & Life Sciences

Chemical Compounds