Contactless Measurement of Short Carrier Lifetime in Heat-treated N-type Silicon

Makoto Sakata, Tatsuya Yamazaki, Yoh Ichiro Ogita, Yoshikazu Ikegami, Hiroshi Onaka, Eiji Ohta

研究成果: Article査読

3 被引用数 (Scopus)

抄録

Sub-microsecond excess carrier lifetimes have been measured by a contactless method and the electrical properties have been investigated by the isothermal capacitance method in heat-treated N-type silicon. It is found that the thermally induced donor level at Ev+0.39 eV acts as recombination center. By using the present contactless measurement system, it becomes possible to accurately measure lifetimes as short as 0.07 µsec, and resistivity-lifetime products, ρτ=0.1 Ωcm · µsec, have been achieved.

本文言語English
ページ(範囲)322-325
ページ数4
ジャーナルJapanese journal of applied physics
23
3
DOI
出版ステータスPublished - 1984 3月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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