Damage-free top-down processes for fabricating two-dimensional arrays of 7nm GaAs nanodiscs using bio-templates and neutral beam etching
Xuan Yu Wang, Chi Hsien Huang, Rikako Tsukamoto, Pierre Andre Mortemousque, Kohei M. Itoh, Yuzo Ohno, Seiji Samukawa
研究成果: Article › 査読
16
被引用数
(Scopus)