Detecting Submicron-Scale Continuous Variation in Phase of AC Magnetic Field around Micro-Circuit with Diamond Quantum Sensor

Fuki Otsubo, Takumi Mikawa, Yuichiro Matsuzaki, Norio Tokuda, Norikazu Mizuochi, Junko Ishi-Hayase

研究成果: Paper査読

抄録

Magnetic field distribution is significant information for LSI failure analysis. In this study, we detected continuous change in phase of AC magnetic field as well as amplitude utilizing RF-dressed states of electron spins in diamond.

本文言語English
出版ステータスPublished - 2024
イベント2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of
継続期間: 2024 8月 42024 8月 8

Conference

Conference2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
国/地域Korea, Republic of
CityIncheon
Period24/8/424/8/8

ASJC Scopus subject areas

  • 器械工学
  • 原子分子物理学および光学

フィンガープリント

「Detecting Submicron-Scale Continuous Variation in Phase of AC Magnetic Field around Micro-Circuit with Diamond Quantum Sensor」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル