TY - JOUR
T1 - Detection principle and verification of non-contact displacement meter with pico-meter resolution
AU - Tamiya, Hideaki
AU - Taniguchi, Kayoko
AU - Yamazaki, Kazuo
AU - Aoyama, Hideki
N1 - Publisher Copyright:
© 2018 The Japan Society of Mechanical Engineers.
PY - 2018
Y1 - 2018
N2 - Displacement sensors based on laser or optical fiber technology are recognized for their capacity for non-contact distance measurement based on reflection from an object, but with limited measurement distance and resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large laser source with stabilized-wavelength . This report presents another solution: a non-contact grating interferometer displacement sensor that enables pico-meter resolution with a semiconductor laser source.
AB - Displacement sensors based on laser or optical fiber technology are recognized for their capacity for non-contact distance measurement based on reflection from an object, but with limited measurement distance and resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large laser source with stabilized-wavelength . This report presents another solution: a non-contact grating interferometer displacement sensor that enables pico-meter resolution with a semiconductor laser source.
KW - Displacement sensor
KW - Grating interferometer
KW - Non-contact measurement
KW - Pico-meter resolution
UR - https://www.scopus.com/pages/publications/85055819343
UR - https://www.scopus.com/pages/publications/85055819343#tab=citedBy
U2 - 10.1299/jamdsm.2018jamdsm0107
DO - 10.1299/jamdsm.2018jamdsm0107
M3 - Article
AN - SCOPUS:85055819343
SN - 1881-3054
VL - 12
JO - Journal of Advanced Mechanical Design, Systems and Manufacturing
JF - Journal of Advanced Mechanical Design, Systems and Manufacturing
IS - 5
M1 - JAMDSM0107
ER -