Development of a catalytic silicon micro-combustor for hydrocarbon-fueled power MEMS

C. M. Spadaccini; X. Zhang; C. P. Cadou; N. Miki; I. A. Waitz

doi:10.1109/MEMSYS.2002.984244

Development of a catalytic silicon micro-combustor for hydrocarbon-fueled power MEMS

C. M. Spadaccini, X. Zhang, C. P. Cadou, N. Miki, I. A. Waitz

研究成果: Article › 査読

17 被引用数 (Scopus)

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This paper reports the development of a high efficiency, hydrocarbon-fueled micro-combustion system for a micro-scale gas turbine engine for power generation and micro-propulsion applications. A three-wafer catalytic combustor was fabricated and tested. Efficiencies in excess of 40% were achieved for ethylene-air and propane-air combustion. A fabrication process for a six-wafer catalytic combustor was developed and this device was successfully constructed.

本文言語	English
ページ（範囲）	228-231
ページ数	4
ジャーナル	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOI	https://doi.org/10.1109/MEMSYS.2002.984244
出版ステータス	Published - 2002
外部発表	はい

ASJC Scopus subject areas

機械工学
電子工学および電気工学
制御およびシステム工学

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10.1109/MEMSYS.2002.984244

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Development of a catalytic silicon micro-combustor for hydrocarbon-fueled power MEMS

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