TY - GEN
T1 - Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform
AU - Nakagawa, Takuya
AU - Taguchi, Yoshihiro
AU - Nagasaka, Yuji
N1 - Funding Information:
This research was partially supported by the Japan Society for the Promotion of Science (JSPS) KAKENHI Grant Number 18H01388.
Funding Information:
ACKNOWLEDGMENT This research was partially supported by the academic consortium for nano and micro fabrication of four universities (Keio university, Waseda university, Tokyo institute of technology, and the University of Tokyo).
PY - 2018/9/4
Y1 - 2018/9/4
N2 - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.
AB - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.
KW - Diffusion sensor
KW - Electrothermal actuation
KW - Interfrlometric
KW - MEMS mirror
UR - http://www.scopus.com/inward/record.url?scp=85053917077&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85053917077&partnerID=8YFLogxK
U2 - 10.1109/OMN.2018.8454604
DO - 10.1109/OMN.2018.8454604
M3 - Conference contribution
AN - SCOPUS:85053917077
SN - 9781509063727
T3 - International Conference on Optical MEMS and Nanophotonics
BT - International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
PB - IEEE Computer Society
T2 - 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Y2 - 29 July 2018 through 2 August 2018
ER -