TY - GEN
T1 - Development of micro optical viscosity sensor with focus control system for in-process monitoring
AU - Taguchi, Y.
AU - Nagamachi, R.
AU - Abe, H.
AU - Nagasaka, Y.
PY - 2009/12/16
Y1 - 2009/12/16
N2 - We have developed a novel micro optical viscosity sensor (MOVS) based on a laser-induced capillary wave with focus control system enabling non-contact, short-time (several hundreds of nano seconds), small sample volume (several tens of micro litters), and high-stability in situ / in vivo measurement. The microfabricated MOVS chip consists of two deep trenches holding photonic crystal fibers for laser excitation, and three shallow trenches holding the lensed-fibers for probing / detecting and focus controlling. The optical interference fringe excited by two pulsed laser beams heats the sample surface, and the temporal behavior of surface geometry is detected as a first-order diffracted beam, which contains the information of liquid properties (viscosity and surface tension). In order to verify the applicability of MOVS chip for the in-process monitoring of viscosity, the preliminary measurement using acetone are demonstrated.
AB - We have developed a novel micro optical viscosity sensor (MOVS) based on a laser-induced capillary wave with focus control system enabling non-contact, short-time (several hundreds of nano seconds), small sample volume (several tens of micro litters), and high-stability in situ / in vivo measurement. The microfabricated MOVS chip consists of two deep trenches holding photonic crystal fibers for laser excitation, and three shallow trenches holding the lensed-fibers for probing / detecting and focus controlling. The optical interference fringe excited by two pulsed laser beams heats the sample surface, and the temporal behavior of surface geometry is detected as a first-order diffracted beam, which contains the information of liquid properties (viscosity and surface tension). In order to verify the applicability of MOVS chip for the in-process monitoring of viscosity, the preliminary measurement using acetone are demonstrated.
KW - Laser-induced capillary wave
KW - Measurement technique
KW - Optical interference
KW - Surface tension
KW - Viscosity
UR - http://www.scopus.com/inward/record.url?scp=71749085523&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=71749085523&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2009.5338622
DO - 10.1109/OMEMS.2009.5338622
M3 - Conference contribution
AN - SCOPUS:71749085523
SN - 9781424423828
T3 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
SP - 29
EP - 30
BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
T2 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Y2 - 17 August 2009 through 20 August 2009
ER -