Differential pressure sensor using a piezoresistive cantilever

Hidetoshi Takahashi; Nguyen Minh Dung; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1088/0960-1317/22/5/055015

Differential pressure sensor using a piezoresistive cantilever

Hidetoshi Takahashi
, Nguyen Minh Dung
, Kiyoshi Matsumoto
, Isao Shimoyama

研究成果: Article › 査読

141 被引用数 (Scopus)

抄録

This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 m×100 μm×0.3 μm. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2×10 ⁴Pa ¹and 0.02 Pa from20 Pa to 20 Pa, respectively.

本文言語	English
論文番号	055015
ジャーナル	Journal of Micromechanics and Microengineering
巻	22
号	5
DOI	https://doi.org/10.1088/0960-1317/22/5/055015
出版ステータス	Published - 2012 5月
外部発表	はい

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
材料力学
機械工学
電子工学および電気工学

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@article{6c4971fd32ab4062adeee505052f5154,

title = "Differential pressure sensor using a piezoresistive cantilever",

abstract = "This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 m×100 μm×0.3 μm. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2×10 4Pa 1and 0.02 Pa from20 Pa to 20 Pa, respectively.",

author = "Hidetoshi Takahashi and Dung, \{Nguyen Minh\} and Kiyoshi Matsumoto and Isao Shimoyama",

year = "2012",

month = may,

doi = "10.1088/0960-1317/22/5/055015",

language = "English",

volume = "22",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

number = "5",

}

TY - JOUR

T1 - Differential pressure sensor using a piezoresistive cantilever

AU - Takahashi, Hidetoshi

AU - Dung, Nguyen Minh

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2012/5

Y1 - 2012/5

N2 - This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 m×100 μm×0.3 μm. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2×10 4Pa 1and 0.02 Pa from20 Pa to 20 Pa, respectively.

AB - This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 m×100 μm×0.3 μm. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2×10 4Pa 1and 0.02 Pa from20 Pa to 20 Pa, respectively.

UR - https://www.scopus.com/pages/publications/84860484219

UR - https://www.scopus.com/pages/publications/84860484219#tab=citedBy

U2 - 10.1088/0960-1317/22/5/055015

DO - 10.1088/0960-1317/22/5/055015

M3 - Article

AN - SCOPUS:84860484219

SN - 0960-1317

VL - 22

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 5

M1 - 055015

ER -

Differential pressure sensor using a piezoresistive cantilever

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