Effect of nanoscale surface roughness on the bonding energy of direct-bonded silicon wafers

Keyphrases

• Silicon Wafer 100%
• Nanoscale Roughness 100%
• Bond Energy 100%
• Bonding Quality 66%
• Room Temperature 33%
• Wafer 33%
• Surface Roughness Effect 33%
• Bearing Ratio 33%

Engineering

• Silicon Wafer 100%
• Nanoscale 100%
• Experimental Result 50%
• Room Temperature 50%

Material Science

• Surface Roughness 100%
• Silicon Wafer 100%
• Silicon 50%