A study on the effect of substrate-film lattice mismatch in thin films of lanthanum barium manganese oxide was performed. The films were deposited on substrates using laser ablation to obtain a high temperature coefficient of resistance. The microstructure of films was analyzed using X-ray diffraction and atomic force microscopy. A misfit stress was caused due to the lattice mismatch which changed the surface structure of the films and their temperature dependence of resistivity. Results indicated that the films could be used as an uncooled infrared bolometer material.
|ジャーナル||Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films|
|出版ステータス||Published - 2001 11月|
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