TY - JOUR
T1 - Enhanced perpendicular magnetic anisotropy of ferrimagnetic Mn4N films deposited on the glass substrate
AU - Li, Wenchang
AU - Xu, Xinxing
AU - Gao, Tenghua
AU - Harumoto, Takashi
AU - Nakamura, Yoshio
AU - Shi, Ji
N1 - Funding Information:
J S is grateful for the partial financial support from JSPS KAKENHI Grant No. 19H00864. Part of the results of this work have been obtained using research equipment shared within the framework of the MEXT Project for promoting public utilization of advanced research infrastructure (Program for supporting construction of core facilities), Grant No. JPMXS0440200021.
Publisher Copyright:
© 2022 IOP Publishing Ltd.
PY - 2022/7/7
Y1 - 2022/7/7
N2 - Mn4N films have been prepared on the glass substrate by reactive magnetron sputtering, using Mn3N2 as the seed layer. Compared with Mn4N film directly grown on the glass substrate, the crystallinity and perpendicular magnetic anisotropy (PMA) of the Mn4N film with the seed layer are significantly enhanced. By varying the thickness of the Mn3N2 seed layer, the structural and magnetic properties are systematically investigated. It is shown that the seed layer thickness is pivotal in the growth of Mn4N with good crystallinity. The crystallinity of Mn4N first improves with the increase in the layer thickness of Mn3N2, and degrades after an optimal thickness; this is related to the change in the surface roughness of the Mn3N2 layers. The Mn3N2 layer not only promotes the growth of Mn4N film with c-axis orientation, but also provides additional N atoms to the growing surface to prevent Mn4N from being oxidized. This simple method can be used to prepare high-quality Mn4N films on a glass substrate, which show strong PMA and are suitable for spintronics applications.
AB - Mn4N films have been prepared on the glass substrate by reactive magnetron sputtering, using Mn3N2 as the seed layer. Compared with Mn4N film directly grown on the glass substrate, the crystallinity and perpendicular magnetic anisotropy (PMA) of the Mn4N film with the seed layer are significantly enhanced. By varying the thickness of the Mn3N2 seed layer, the structural and magnetic properties are systematically investigated. It is shown that the seed layer thickness is pivotal in the growth of Mn4N with good crystallinity. The crystallinity of Mn4N first improves with the increase in the layer thickness of Mn3N2, and degrades after an optimal thickness; this is related to the change in the surface roughness of the Mn3N2 layers. The Mn3N2 layer not only promotes the growth of Mn4N film with c-axis orientation, but also provides additional N atoms to the growing surface to prevent Mn4N from being oxidized. This simple method can be used to prepare high-quality Mn4N films on a glass substrate, which show strong PMA and are suitable for spintronics applications.
KW - MnN film
KW - glass substrate
KW - perpendicular magnetic anisotropy
KW - reactive sputtering
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U2 - 10.1088/1361-6463/ac5e1b
DO - 10.1088/1361-6463/ac5e1b
M3 - Article
AN - SCOPUS:85129527033
SN - 0022-3727
VL - 55
JO - Journal of Physics D: Applied Physics
JF - Journal of Physics D: Applied Physics
IS - 27
M1 - 275004
ER -