TY - JOUR
T1 - Experimental analysis of chemical removal effect in RISA grinding of optical glass
AU - Shimodo, Kodai
AU - Takamaru, Hinata
AU - Chiba, Yusuke
AU - Kato, Hidebumi
AU - Nagano, Mikinori
AU - Fukuta, Masahiko
AU - Tanaka, Katsutoshi
AU - Watanabe, Kentaro
AU - Hamazono, Kazuhisa
AU - Kakinuma, Yasuhiro
N1 - Publisher Copyright:
© 2024 The Authors. Published by Elsevier B.V.
PY - 2024
Y1 - 2024
N2 - In the large-aperture lens manufacturing, not only high surface quality but also high productivity is required. From this perspective, Reaction-Induced-Slurry-Assisted grinding (RISA grinding), in which cerium oxide slurry is supplied instead of using general grinding fluid, has been developed to achieve high surface quality at high removal rate. However, the surface profile error becomes large due to chemical removal effect of the cerium oxide slurry. Therefore, the purpose of this study is to experimentally investigate the influence of the chemical removal effect on the surface profile error using AE signals and servo current signals in RISA grinding. First, relation between dwell time and removal depth is analyzed by conducting a basic grinding test without the workpiece rotation. The result shows that the actual removal depth increases with increase of dwell time despite applying the constant depth of cut. Then, zero-cut RISA grinding test is conducted. It is found that the removal process proceeds even though zero-cut grinding, and its removal rate varies according to the wheel feed rate. Furthermore, the amount of cerium oxide abrasives adhered to the grinding wheel can be estimated from the AE signals and servo current signals.
AB - In the large-aperture lens manufacturing, not only high surface quality but also high productivity is required. From this perspective, Reaction-Induced-Slurry-Assisted grinding (RISA grinding), in which cerium oxide slurry is supplied instead of using general grinding fluid, has been developed to achieve high surface quality at high removal rate. However, the surface profile error becomes large due to chemical removal effect of the cerium oxide slurry. Therefore, the purpose of this study is to experimentally investigate the influence of the chemical removal effect on the surface profile error using AE signals and servo current signals in RISA grinding. First, relation between dwell time and removal depth is analyzed by conducting a basic grinding test without the workpiece rotation. The result shows that the actual removal depth increases with increase of dwell time despite applying the constant depth of cut. Then, zero-cut RISA grinding test is conducted. It is found that the removal process proceeds even though zero-cut grinding, and its removal rate varies according to the wheel feed rate. Furthermore, the amount of cerium oxide abrasives adhered to the grinding wheel can be estimated from the AE signals and servo current signals.
KW - Chemical mechanical grinding
KW - Optical lens
KW - Ultra-precision grinding
UR - https://www.scopus.com/pages/publications/85196798763
UR - https://www.scopus.com/pages/publications/85196798763#tab=citedBy
U2 - 10.1016/j.procir.2024.05.054
DO - 10.1016/j.procir.2024.05.054
M3 - Conference article
AN - SCOPUS:85196798763
SN - 2212-8271
VL - 123
SP - 304
EP - 309
JO - Procedia CIRP
JF - Procedia CIRP
T2 - 7th CIRP Conference on Surface Integrity, CSI 2024
Y2 - 15 May 2024 through 17 May 2024
ER -