Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer

T. Dohi, H. Hayashi, H. Onoe, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

This paper reports on a fabrication method of sub-micrometer size tunable planar gaps for micro Fabry-Perot interferometers. We made an upper unit with a movable sub-micrometer step and a lower unit, separately. The upper unit was picked up and transferred to the lower unit by the stamping apparatus, and bonded to the lower unit by fusion bonding. Since the force during fusion bonding acts within a few nanometers only, the sub-micrometer size planar gap can be built. By using this fabrication method, we fabricated the 850 nm gap with a movable planar mirror of 500 μm in diameter. The gap was changed from 825 nm to 1020 nm by applying the voltage of 24 V.

本文言語English
ホスト出版物のタイトルMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
ページ335-338
ページ数4
DOI
出版ステータスPublished - 2008
外部発表はい
イベント21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
継続期間: 2008 1月 132008 1月 17

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
国/地域United States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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