Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques

Jiwang Yan, Kentaro Watanabe, Yutaro Nakagawa

研究成果: Conference article査読

3 被引用数 (Scopus)

抄録

A novel fabrication process was proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications, which combines MEMS technologies and diamond turning technology. To prevent thin-film lens substrates from deflection during diamond turning, the thin films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure has been generated on the metal thin films by diamond turning, the backside supporting silicon substrate was selectively removed by reactive ion etching. Experimental results demonstrated that submicron level form accuracy and nanometer level surface roughness could be achieved by the proposed hybrid fabrication process.

本文言語English
ページ(範囲)146-150
ページ数5
ジャーナルProcedia CIRP
4
DOI
出版ステータスPublished - 2012 1月 1
イベント3rd CIRP Conference on Process Machine Interactions, PMI 2012 - Nagoya, Japan
継続期間: 2012 10月 292012 10月 30

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 産業および生産工学

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