@inproceedings{adbf260f42bc4d8e997db4cf39c54e0f,
title = "Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch",
abstract = "This paper presents high cycle fatigue properties of a Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1 μm and 480.0μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and -0.1514, respectively.",
keywords = "Axial loading, Fatigue property, MEMS material, Static property",
author = "Park, {Jun Hyub} and Lee, {Chang Seung} and Kim, {Yun Jae}",
year = "2006",
doi = "10.4028/3-908451-15-9.3",
language = "English",
isbn = "3908451159",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "3--8",
booktitle = "Advances in Safety and Structural Integrity 2005 - Proceedings of the International Symposium on Safety and Structural Integrity",
note = "International Symposium on Safety and Structural Integrity ; Conference date: 17-01-2005 Through 20-01-2005",
}