TY - GEN
T1 - Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method
AU - Sota, Shota
AU - Handa, Koichiro
AU - Tanabe, Takasumi
AU - Uzawa, Yoshinori
AU - Furusawa, Kentaro
AU - Sekine, Norihiko
N1 - Funding Information:
A part of this study was supported by JSPS KAKENHI Grant Number JP17K06410.
Publisher Copyright:
© Optica Publishing Group 2022, © 2022 The Author(s)
PY - 2022
Y1 - 2022
N2 - We report frequency comb generation in a silicon nitride (SiN) based microring resonator fabricated by the hot-wire chemical vapor deposition (HW-CVD) method with an intrinsic quality factor in excess of 5×105,.
AB - We report frequency comb generation in a silicon nitride (SiN) based microring resonator fabricated by the hot-wire chemical vapor deposition (HW-CVD) method with an intrinsic quality factor in excess of 5×105,.
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M3 - Conference contribution
AN - SCOPUS:85139913333
T3 - 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
BT - 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 Conference on Lasers and Electro-Optics, CLEO 2022
Y2 - 15 May 2022 through 20 May 2022
ER -