In the field of roundness measurements, the 3-point method is very useful. We used this method for precise column estimation in the range of 0.01 micron p-p including high-order harmonic components up to the 254th. The high-order calculation is critical for setting angles among three sensors. We determined the invalid setting angles and showed it on a chart, and we show a method for obtaining suitable accurate angles among these sensors. We are testing the relative accuracy on the testing model. Absolute accuracy has not been confirmed yet, but we consider that these results show me a reasonable roundness.
|Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
|Published - 1996
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