High Spatial Resolution OBIRCH and OBIC Effects Realized by Near-field Optical Probe in the Analysis of High Resistance 200 nm Wide TiSi Line

K. Nikawa; T. Saiki; S. Inoue; M. Ohtsu

High Spatial Resolution OBIRCH and OBIC Effects Realized by Near-field Optical Probe in the Analysis of High Resistance 200 nm Wide TiSi Line

K. Nikawa, T. Saiki, S. Inoue, M. Ohtsu

研究成果: Paper › 査読

抄録

The optical-beam-induced resistance-change-detection (OBRICH) method which used near-field-optical-probe as heat source was investigated for high resolution 200 nm wide TiSi line. The OBRICH used laser-beam heating and resistance-change detection processes. An Ar laser was introduced to test NF-OBIRCH method into near-field optical probe and was scanned in the area of interest which used shear force feedback technique. The results show that the OBIRCH method had higher spatial resolution and the method caused by heating was observed when metallized probe was used without interference from the optical beam induced current (OBIC).

本文言語	English
ページ	25-29
ページ数	5
出版ステータス	Published - 1998
外部発表	はい
イベント	Proceedings of the 24th Symposium for Testing and Failure Analysis - Dallas, TX, United States 継続期間: 1998 11月 15 → 1998 11月 19

Other

Other	Proceedings of the 24th Symposium for Testing and Failure Analysis
国/地域	United States
City	Dallas, TX
Period	98/11/15 → 98/11/19

ASJC Scopus subject areas

制御およびシステム工学
安全性、リスク、信頼性、品質管理
電子工学および電気工学

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引用スタイル

@conference{76088be2d5a04e0bb80fe4f91be4b70d,

title = "High Spatial Resolution OBIRCH and OBIC Effects Realized by Near-field Optical Probe in the Analysis of High Resistance 200 nm Wide TiSi Line",

abstract = "The optical-beam-induced resistance-change-detection (OBRICH) method which used near-field-optical-probe as heat source was investigated for high resolution 200 nm wide TiSi line. The OBRICH used laser-beam heating and resistance-change detection processes. An Ar laser was introduced to test NF-OBIRCH method into near-field optical probe and was scanned in the area of interest which used shear force feedback technique. The results show that the OBIRCH method had higher spatial resolution and the method caused by heating was observed when metallized probe was used without interference from the optical beam induced current (OBIC).",

author = "K. Nikawa and T. Saiki and S. Inoue and M. Ohtsu",

year = "1998",

language = "English",

pages = "25--29",

note = "Proceedings of the 24th Symposium for Testing and Failure Analysis ; Conference date: 15-11-1998 Through 19-11-1998",

}

TY - CONF

T1 - High Spatial Resolution OBIRCH and OBIC Effects Realized by Near-field Optical Probe in the Analysis of High Resistance 200 nm Wide TiSi Line

AU - Nikawa, K.

AU - Saiki, T.

AU - Inoue, S.

AU - Ohtsu, M.

PY - 1998

Y1 - 1998

N2 - The optical-beam-induced resistance-change-detection (OBRICH) method which used near-field-optical-probe as heat source was investigated for high resolution 200 nm wide TiSi line. The OBRICH used laser-beam heating and resistance-change detection processes. An Ar laser was introduced to test NF-OBIRCH method into near-field optical probe and was scanned in the area of interest which used shear force feedback technique. The results show that the OBIRCH method had higher spatial resolution and the method caused by heating was observed when metallized probe was used without interference from the optical beam induced current (OBIC).

AB - The optical-beam-induced resistance-change-detection (OBRICH) method which used near-field-optical-probe as heat source was investigated for high resolution 200 nm wide TiSi line. The OBRICH used laser-beam heating and resistance-change detection processes. An Ar laser was introduced to test NF-OBIRCH method into near-field optical probe and was scanned in the area of interest which used shear force feedback technique. The results show that the OBIRCH method had higher spatial resolution and the method caused by heating was observed when metallized probe was used without interference from the optical beam induced current (OBIC).

UR - http://www.scopus.com/inward/record.url?scp=1542360811&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1542360811&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:1542360811

SP - 25

EP - 29

T2 - Proceedings of the 24th Symposium for Testing and Failure Analysis

Y2 - 15 November 1998 through 19 November 1998

ER -