The optical-beam-induced resistance-change-detection (OBRICH) method which used near-field-optical-probe as heat source was investigated for high resolution 200 nm wide TiSi line. The OBRICH used laser-beam heating and resistance-change detection processes. An Ar laser was introduced to test NF-OBIRCH method into near-field optical probe and was scanned in the area of interest which used shear force feedback technique. The results show that the OBIRCH method had higher spatial resolution and the method caused by heating was observed when metallized probe was used without interference from the optical beam induced current (OBIC).
|Published - 1998
|Proceedings of the 24th Symposium for Testing and Failure Analysis - Dallas, TX, United States
継続期間: 1998 11月 15 → 1998 11月 19
|Proceedings of the 24th Symposium for Testing and Failure Analysis
|98/11/15 → 98/11/19
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