TY - CHAP
T1 - Hybrid Integration of Quantum-Dot Non-classical Light Sources on Si
AU - Katsumi, Ryota
AU - Ota, Yasutomo
AU - Iwamoto, Satoshi
AU - Arakawa, Yasuhiko
N1 - Funding Information:
The authors thank to Prof. Hidefumi Akiyama, Mr. Masao Nishioka, Dr. Satomi Ishida, Dr. Masahiro Kakuda, Dr. Alto Osada, Dr. Takeyoshi Tajiri, Dr. Kazuhiro Kuruma, Mr. Akihito Tamada, Mr. Takuto Yamaguchi for their encouragement and collaborations throughout the course of the authors research work on hybrid integrated photonic circuits.
Publisher Copyright:
© 2022, The Author(s), under exclusive license to Springer Nature Switzerland AG.
PY - 2022
Y1 - 2022
N2 - This chapter describes the hybrid integration of quantum-dot single-photon sources (QD SPSs) on Si toward the scalable Si quantum photonics. In this study, transfer printing (TP) has been extensively investigated, a technique that simply relies on pick-and-place integration based on van der Waals force, and thus is fully compatible with the CMOS back-end process to exploit mature CMOS technology. Using TP, QD SPSs were hybrid integrated on a CMOS Si chip. It was confirmed that the integrated QDs can generate single photons on a CMOS Si chip. We also observed efficient waveguide coupling of emitted single photons. Furthermore, we extended our TP method for investigating the multiple identical SPSs hybrid integrated on Si. We believe that our TP-based approach will provide a novel pathway toward the scalable implementation of multiple identical QD SPSs on the same CMOS Si chip.
AB - This chapter describes the hybrid integration of quantum-dot single-photon sources (QD SPSs) on Si toward the scalable Si quantum photonics. In this study, transfer printing (TP) has been extensively investigated, a technique that simply relies on pick-and-place integration based on van der Waals force, and thus is fully compatible with the CMOS back-end process to exploit mature CMOS technology. Using TP, QD SPSs were hybrid integrated on a CMOS Si chip. It was confirmed that the integrated QDs can generate single photons on a CMOS Si chip. We also observed efficient waveguide coupling of emitted single photons. Furthermore, we extended our TP method for investigating the multiple identical SPSs hybrid integrated on Si. We believe that our TP-based approach will provide a novel pathway toward the scalable implementation of multiple identical QD SPSs on the same CMOS Si chip.
UR - https://www.scopus.com/pages/publications/85142896345
UR - https://www.scopus.com/inward/citedby.url?scp=85142896345&partnerID=8YFLogxK
U2 - 10.1007/978-3-031-16518-4_4
DO - 10.1007/978-3-031-16518-4_4
M3 - Chapter
AN - SCOPUS:85142896345
T3 - Topics in Applied Physics
SP - 93
EP - 121
BT - Topics in Applied Physics
PB - Springer Science and Business Media Deutschland GmbH
ER -