抄録
We have proposed a hybrid model for dc magnetron discharge. Simulations of the discharges under different applied voltages are performed using the hybrid model. We confirm that this hybrid model is able to predict a magnetron discharge under conditions of less than 1 Pa by comparing the results from the simulation with that from the experiment. We also perform simulations of dc magnetron discharges under conditions of different gas pressures and different magnitudes of magnetic field. In so doing, we clarify the influence of gas pressure and magnetic field upon dc magnetron discharge.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 299-306 |
| ページ数 | 8 |
| ジャーナル | Vacuum |
| 巻 | 60 |
| 号 | 3 |
| DOI | |
| 出版ステータス | Published - 2001 3月 |
ASJC Scopus subject areas
- 器械工学
- 凝縮系物理学
- 表面、皮膜および薄膜