Optical signal processing circuits can realize ultimately efficient signal processing. Optical micro-cavities, which can localize light at certain spots, are important components for the circuits. Single-crystal calcium fluoride (CaF2) is the most suitable material for highly efficient optical micro-cavities, and ultra-precision cylindrical turning (UPCT) is a feasible fabrication process for CaF2 optical micro-cavities. However, CaF2 is characterized by brittleness and crystal anisotropy; therefore, it is necessary to prevent microcracks in UPCT because such cracks would lead to light scattering and cavity performance deterioration. In this study, we conduct plunge-cut tests on CaF2 substrate with various single point diamond tools, and experimentally investigate the influence of tool geometry and process parameters on critical depth of cut. Based on the experimental results, enhancement of CaF2 micro-cavity is attempted.
|ホスト出版物のタイトル||Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017|
|出版ステータス||Published - 2017 1月 1|
|イベント||17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 - Hannover, Germany|
継続期間: 2017 5月 29 → 2017 6月 2
|Other||17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017|
|Period||17/5/29 → 17/6/2|
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