Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving

Seyed Nader Ameli Kalkhoran, Mehrdad Vahdati, Zhiyu Zhang, Jiwang Yan

研究成果: Article査読

6 被引用数 (Scopus)


Lubrication can improve the tool-workpiece interface condition in ultraprecision machining, especially in microgrooving processes. The aim of this study was to compare the effects of dry, liquid (cutting oil), solid (wax) and hybrid (cutting oil and wax) lubrication conditions, on the creation of arc-sectioned microgrooves on single-crystal silicon wafers using a single-crystal diamond tool. Micro cutting forces, chip morphology, and surface quality at different locations of the grooves were investigated. Rose-shaped continuous chips were observed in dry cutting, indicating stable ductile mode material removal. The entrance side of the groove was always smoother than the exit side with a higher degree of phase transformation. Chip adhesions on the tool edge were found in dry and oil lubricated cutting, whereas wax coating could prevent the adhesion. Wax coating played the dual roles of a chip breaker as well as a high-performance lubricant, thus improved the surface integrity. This study demonstrated the capability of using wax coating as an environmentally friendly solid lubricant for microgrooving of single-crystal silicon and possibly for other hard brittle materials.

ジャーナルInternational Journal of Precision Engineering and Manufacturing - Green Technology
出版ステータスPublished - 2021 3月

ASJC Scopus subject areas

  • 再生可能エネルギー、持続可能性、環境
  • 材料科学(全般)
  • 機械工学
  • 産業および生産工学
  • 技術マネージメントおよび技術革新管理


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