TY - GEN
T1 - Interaction between free-surface oscillation and bubble translation in a megasonic cleaning bath
AU - Katano, Yu
AU - Ando, Keita
N1 - Publisher Copyright:
© 2021 Trans Tech Publications Ltd, Switzerland.
PY - 2021
Y1 - 2021
N2 - Visualization experiments were performed to study the relation between free-surface motion and bubble translation in a 1-MHz ultrasonic cleaning bath. From the visualization with a video camera, the characteristic frequencies of the free-surface oscillation (under the acoustic radiation force) and the translational velocity of cavitation bubbles (trapped via the primary Bjerknes force) were extracted, showing that there is a strong correlation between the free-surface oscillation and bubble translation. From the context of megasonic cleaning, such free-surface oscillation is expected to contribute to uniform cleaning performance with cavitation bubbles.
AB - Visualization experiments were performed to study the relation between free-surface motion and bubble translation in a 1-MHz ultrasonic cleaning bath. From the visualization with a video camera, the characteristic frequencies of the free-surface oscillation (under the acoustic radiation force) and the translational velocity of cavitation bubbles (trapped via the primary Bjerknes force) were extracted, showing that there is a strong correlation between the free-surface oscillation and bubble translation. From the context of megasonic cleaning, such free-surface oscillation is expected to contribute to uniform cleaning performance with cavitation bubbles.
KW - Acoustic cavitation
KW - Bubble translation
KW - Free-surface oscillation
KW - Megasonic cleaning bath
UR - http://www.scopus.com/inward/record.url?scp=85102012907&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85102012907&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/SSP.314.202
DO - 10.4028/www.scientific.net/SSP.314.202
M3 - Conference contribution
AN - SCOPUS:85102012907
SN - 9783035738018
T3 - Solid State Phenomena
SP - 202
EP - 206
BT - Ultra Clean Processing of Semiconductor Surfaces XV - Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
A2 - Mertens, Paul W.
A2 - Wostyn, Kurt
A2 - Meuris, Marc
A2 - Heyns, Marc
PB - Trans Tech Publications Ltd
T2 - 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
Y2 - 12 April 2021 through 15 April 2021
ER -