TY - JOUR
T1 - Laser Direct Writing of Highly Crystalline Graphene on Polydimethylsiloxane for Fingertip-Sized Piezoelectric Sensors
AU - Hayashi, Shuichiro
AU - Morosawa, Fumiya
AU - Terakawa, Mitsuhiro
N1 - Funding Information:
This work was partially supported by the Keio Gijuku Fukuzawa Memorial Fund for the Advancement of Education and Research. S.H. prepared the materials, setup, and structures. S.H. and F.M. conducted the characterizations and analyses. S.H. volunteered in the HR experiments. S.H., F.M., and M.T. participated in the discussions. S.H. and M.T. wrote the manuscript. M.T. supervised the project. All authors approved the final version of the manuscript.
Publisher Copyright:
© 2021 Wiley-VCH GmbH
PY - 2021/10
Y1 - 2021/10
N2 - The patterning of electrically conductive structures directly onto the polydimethylsiloxane (PDMS) surface is crucial for the realization of flexible and elastic devices. Herein, defocused femtosecond laser pulses are irradiated for the fabrication of highly crystalline graphitic carbon structures on PDMS and a high electrical conductivity of ≈51.6 S m−1 is achieved. Utilizing the elasticity of PDMS and the high conductivity of fabricated structures, a fingertip-sized pressure sensor, which can detect pressures as low as ≈0.1 Pa, is realized. Moreover, a novel ring-shaped heart rate (HR) monitor, capable of measuring the HR from the index finger, is demonstrated, indicating the potential of fabricated structures in miniature and wearable healthcare applications.
AB - The patterning of electrically conductive structures directly onto the polydimethylsiloxane (PDMS) surface is crucial for the realization of flexible and elastic devices. Herein, defocused femtosecond laser pulses are irradiated for the fabrication of highly crystalline graphitic carbon structures on PDMS and a high electrical conductivity of ≈51.6 S m−1 is achieved. Utilizing the elasticity of PDMS and the high conductivity of fabricated structures, a fingertip-sized pressure sensor, which can detect pressures as low as ≈0.1 Pa, is realized. Moreover, a novel ring-shaped heart rate (HR) monitor, capable of measuring the HR from the index finger, is demonstrated, indicating the potential of fabricated structures in miniature and wearable healthcare applications.
KW - femtosecond lasers
KW - flexible devices
KW - laser direct writing
KW - polydimethylsiloxane
KW - pressure sensors
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U2 - 10.1002/adem.202100457
DO - 10.1002/adem.202100457
M3 - Article
AN - SCOPUS:85108366132
SN - 1438-1656
VL - 23
JO - Advanced Engineering Materials
JF - Advanced Engineering Materials
IS - 10
M1 - 2100457
ER -