Laser-induced desorption from compound semiconductors

K. Ichige, Y. Matsumoto, A. Namiki

研究成果: Article査読

22 被引用数 (Scopus)

抄録

Laser-induced desorption in compound semiconductors has been investigated using a dynamic mass spectroscopic method. When the target material was characterized by its bond ionicity fi, as scaled by Phillips [13], the observed threshold fluence shows a good decreasing correlation with fi. The concept of the fi dependent structural instability, which is well established in the ground state [13], was extended to the electronically excited system. A model is proposed for laser sputtering in tetrahedrally bonded materials based on a phase transition mechanism under a dense electron-hole plasma, which involves a dimerization interaction between nonmetallic elements.

本文言語English
ページ(範囲)820-823
ページ数4
ジャーナルNuclear Inst. and Methods in Physics Research, B
33
1-4
DOI
出版ステータスPublished - 1988 6月 2
外部発表はい

ASJC Scopus subject areas

  • 核物理学および高エネルギー物理学
  • 器械工学

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