@inproceedings{518b0dcb9e6c4789a0dea0cade453cf2,
title = "Light harvesting self-powered strain sensor using 3C-SiC/Si heterostructure",
abstract = "Herein we report a light harvesting self-powered strain sensor using a monolithic heterojunction structure. Firstly, a strain sensor in a geometry of a cantilever with a 3C-SiC/Si heterojunction sensing element is fabricated. Secondly, light energy harvesting ability of the strain sensor is demonstrated under illumination of a commercial LED. Finally, the performance of the sensor under the self-powered mode is evaluated by inducing strain in the sensing element and simultaneously monitoring the change of converted electrical energy. Under illumination of LED with light power of 428 μW, the generated photovoltage is as high as approximately 16.4 mV. The sensor can harvest light energy convert it into electrical energy to power itself and sense the strain ranging from 200 ppm to 700 ppm with a sensitivity of approximately 0.06 μV /ppm.",
keywords = "Silicon carbide, heterostructure, light harvesting, self-powered sensor, strain sensor",
author = "Thanh Nguyen and {Van Nguyen}, Duy and Hung Nguyen and Braiden Tong and Tran, {Canh Dung} and Hidetoshi Takahashi and Dau, {Van Thanh} and Nguyen, {Nam Trung} and Dao, {Dzung Viet} and Toan Dinh",
note = "Funding Information: This work has been supported by Australian Research Council grant DE210100852. The 3C-SiC material was developed and supplied by Leonie Hold and Alan Iacopi of the Queensland Microtechnology Facility, part of the Queensland node – Griffith – of the Australian National Fabrication Facility, a company established under the National Collaborative Research Infrastructure Strategy to provide nano and microfabrication facilities for Australia's researchers. Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE Sensors Conference, SENSORS 2022 ; Conference date: 30-10-2022 Through 02-11-2022",
year = "2022",
doi = "10.1109/SENSORS52175.2022.9967004",
language = "English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings",
}