Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array

Gakuto Kagawa; Hidetoshi Takahashi

doi:10.1109/MEMS49605.2023.10052567

Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array

Gakuto Kagawa, Hidetoshi Takahashi

機械工学科

研究成果: Conference contribution

抄録

This paper reports liquid-immersion inclined/rotated UV lithography for fabricating micro suction cups. Microstructures such as micro suction cups have been applied in various applications. However, the conventional fabrication method had limitations in suction force due to the insufficient inclination angle. We proposed liquid-immersion to inclined/rotated exposure (IRE), enabling greater microstructure inclination angles. IRE equipment was developed to fabricate PDMS micro suction cup arrays. The experimental inclination angle reached 51°, nearly doubling the conventional IRE method.

本文言語	English
ホスト出版物のタイトル	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	610-612
ページ数	3
ISBN（電子版）	9781665493086
DOI	https://doi.org/10.1109/MEMS49605.2023.10052567
出版ステータス	Published - 2023
イベント	36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 - Munich, Germany 継続期間: 2023 1月 15 → 2023 1月 19

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
巻	2023-January
ISSN（印刷版）	1084-6999

Conference

Conference	36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
国/地域	Germany
City	Munich
Period	23/1/15 → 23/1/19

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMS49605.2023.10052567

他のファイルとリンク

引用スタイル

Kagawa, G., & Takahashi, H. (2023). Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 610-612). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS49605.2023.10052567

Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. / Kagawa, Gakuto; Takahashi, Hidetoshi.
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 610-612 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January).

研究成果: Conference contribution

Kagawa, G & Takahashi, H 2023, Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2023-January, Institute of Electrical and Electronics Engineers Inc., pp. 610-612, 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023, Munich, Germany, 23/1/15. https://doi.org/10.1109/MEMS49605.2023.10052567

Kagawa G, Takahashi H. Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 610-612. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS49605.2023.10052567

Kagawa, Gakuto ; Takahashi, Hidetoshi. / Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 610-612 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array",

abstract = "This paper reports liquid-immersion inclined/rotated UV lithography for fabricating micro suction cups. Microstructures such as micro suction cups have been applied in various applications. However, the conventional fabrication method had limitations in suction force due to the insufficient inclination angle. We proposed liquid-immersion to inclined/rotated exposure (IRE), enabling greater microstructure inclination angles. IRE equipment was developed to fabricate PDMS micro suction cup arrays. The experimental inclination angle reached 51°, nearly doubling the conventional IRE method.",

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author = "Gakuto Kagawa and Hidetoshi Takahashi",

note = "Funding Information: This work was partly supported by Mitutoyo Association for Science and Technology (MAST). Publisher Copyright: {\textcopyright} 2023 IEEE.; 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",

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Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array

抄録

出版物シリーズ

Conference

ASJC Scopus subject areas

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