Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces

Tetsuo Kan; Akihiro Isozaki; Hidetoshi Takahashi; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2014.6765790

Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces

Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

抄録

We propose an out-of-plane MEMS actuator with a large stroke length comparable to the size of the actuator itself. The proposed device is actuated by the combined forces of the electrostatic and the pneumatic forces. This combination of two independent forces enlarges a stable area during the actuation, resulting in a large stroke which is difficult to be achieved with only either force. The 3D profiling by the laser scanning microscopy confirmed the largest stroke of 103 μm was obtained with the 150-μm-diameter actuator area with the electric field of 5.8 × 10⁵ V/m (330V between the electrodes) and the air pressure of 2.0 kPa.

本文言語	English
ホスト出版物のタイトル	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	913-916
ページ数	4
ISBN（印刷版）	9781479935086
DOI	https://doi.org/10.1109/MEMSYS.2014.6765790
出版ステータス	Published - 2014 1月 1
外部発表	はい
イベント	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States 継続期間: 2014 1月 26 → 2014 1月 30

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
国/地域	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMSYS.2014.6765790

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引用スタイル

Kan, T., Isozaki, A., Takahashi, H., Matsumoto, K., & Shimoyama, I. (2014). Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 913-916). 記事 6765790 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765790

Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. / Kan, Tetsuo; Isozaki, Akihiro; Takahashi, Hidetoshi その他.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 913-916 6765790 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

研究成果: Conference contribution

Kan, T, Isozaki, A, Takahashi, H, Matsumoto, K & Shimoyama, I 2014, Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765790, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 913-916, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765790

Kan T, Isozaki A, Takahashi H, Matsumoto K, Shimoyama I. Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 913-916. 6765790. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765790

Kan, Tetsuo ; Isozaki, Akihiro ; Takahashi, Hidetoshi その他. / Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 913-916 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We propose an out-of-plane MEMS actuator with a large stroke length comparable to the size of the actuator itself. The proposed device is actuated by the combined forces of the electrostatic and the pneumatic forces. This combination of two independent forces enlarges a stable area during the actuation, resulting in a large stroke which is difficult to be achieved with only either force. The 3D profiling by the laser scanning microscopy confirmed the largest stroke of 103 μm was obtained with the 150-μm-diameter actuator area with the electric field of 5.8 × 105 V/m (330V between the electrodes) and the air pressure of 2.0 kPa.",

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Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces

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出版物シリーズ

Other

ASJC Scopus subject areas

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