Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.
|2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers
|Institute of Electrical and Electronics Engineers Inc.
|Published - 2019 6月
|39th Symposium on VLSI Technology, VLSI Technology 2019 - Kyoto, Japan
継続期間: 2019 6月 9 → 2019 6月 14
|Digest of Technical Papers - Symposium on VLSI Technology
|39th Symposium on VLSI Technology, VLSI Technology 2019
|19/6/9 → 19/6/14
ASJC Scopus subject areas