Machining-induced subsurface damage in single-crystal silicon-formation, characterization, and recovery-

研究成果: Review article › 査読

本文言語	English
ページ（範囲）	971-974
ページ数	4
ジャーナル	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
巻	84
号	12
DOI	https://doi.org/10.2493/jjspe.84.971
出版ステータス	Published - 2018 1月 1

ASJC Scopus subject areas

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