Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O3

Yutaka Tomimatsu; Hidetoshi Takahashi; Kenta Kuwana; Takeshi Kobayashi; Kiyoshi Matsumoto; Isao Shimoyama; Toshihiro Itoh; Ryutaro Maeda

Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O₃

Yutaka Tomimatsu, Hidetoshi Takahashi, Kenta Kuwana, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

研究成果: Conference contribution

抄録

We proposed a thin piezoelectric cantilever to measure an airflow velocity change. An airflow sensor using a PZT cantilever and a flow channel was fabricated. We measured the relationship between the airflow velocity change and the piezoelectric voltage of the cantilever. The dimensions of the sensor and the cantilever are 25 mm × 20 mm × 20 mm and 1500 μm × 1000 μm × 2 μm respectively. We evaluated the effect of the diameter of the flow channel on the sensor response. It was demonstrated that the fabricated sensor generated an output voltage of several millivolts when the airflow velocity changed at a rate of approximately 1 m/s. It was observed that the output voltage increased as the diameter of the flow channel became small.

本文言語	English
ホスト出版物のタイトル	2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
出版ステータス	Published - 2013
外部発表	はい
イベント	2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013 - Barcelona, Spain 継続期間: 2013 4月 16 → 2013 4月 18

出版物シリーズ

名前	2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013

Conference

Conference	2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
国/地域	Spain
City	Barcelona
Period	13/4/16 → 13/4/18

ASJC Scopus subject areas

ハードウェアとアーキテクチャ

他のファイルとリンク

引用スタイル

Tomimatsu, Y., Takahashi, H., Kuwana, K., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T., & Maeda, R. (2013). Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O₃. In 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013 記事 6559430 (2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013).

Tomimatsu, Y, Takahashi, H, Kuwana, K, Kobayashi, T, Matsumoto, K, Shimoyama, I, Itoh, T & Maeda, R 2013, Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O₃. in 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013., 6559430, 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013, 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013, Barcelona, Spain, 13/4/16.

@inproceedings{88c44f7958b74083bd298fcb9f153679,

title = "Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O3",

abstract = "We proposed a thin piezoelectric cantilever to measure an airflow velocity change. An airflow sensor using a PZT cantilever and a flow channel was fabricated. We measured the relationship between the airflow velocity change and the piezoelectric voltage of the cantilever. The dimensions of the sensor and the cantilever are 25 mm × 20 mm × 20 mm and 1500 μm × 1000 μm × 2 μm respectively. We evaluated the effect of the diameter of the flow channel on the sensor response. It was demonstrated that the fabricated sensor generated an output voltage of several millivolts when the airflow velocity changed at a rate of approximately 1 m/s. It was observed that the output voltage increased as the diameter of the flow channel became small.",

author = "Yutaka Tomimatsu and Hidetoshi Takahashi and Kenta Kuwana and Takeshi Kobayashi and Kiyoshi Matsumoto and Isao Shimoyama and Toshihiro Itoh and Ryutaro Maeda",

year = "2013",

language = "English",

isbn = "9781467344777",

series = "2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013",

booktitle = "2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013",

note = "2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013 ; Conference date: 16-04-2013 Through 18-04-2013",

}

TY - GEN

T1 - Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O3

AU - Tomimatsu, Yutaka

AU - Takahashi, Hidetoshi

AU - Kuwana, Kenta

AU - Kobayashi, Takeshi

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

PY - 2013

Y1 - 2013

N2 - We proposed a thin piezoelectric cantilever to measure an airflow velocity change. An airflow sensor using a PZT cantilever and a flow channel was fabricated. We measured the relationship between the airflow velocity change and the piezoelectric voltage of the cantilever. The dimensions of the sensor and the cantilever are 25 mm × 20 mm × 20 mm and 1500 μm × 1000 μm × 2 μm respectively. We evaluated the effect of the diameter of the flow channel on the sensor response. It was demonstrated that the fabricated sensor generated an output voltage of several millivolts when the airflow velocity changed at a rate of approximately 1 m/s. It was observed that the output voltage increased as the diameter of the flow channel became small.

AB - We proposed a thin piezoelectric cantilever to measure an airflow velocity change. An airflow sensor using a PZT cantilever and a flow channel was fabricated. We measured the relationship between the airflow velocity change and the piezoelectric voltage of the cantilever. The dimensions of the sensor and the cantilever are 25 mm × 20 mm × 20 mm and 1500 μm × 1000 μm × 2 μm respectively. We evaluated the effect of the diameter of the flow channel on the sensor response. It was demonstrated that the fabricated sensor generated an output voltage of several millivolts when the airflow velocity changed at a rate of approximately 1 m/s. It was observed that the output voltage increased as the diameter of the flow channel became small.

UR - http://www.scopus.com/inward/record.url?scp=84883111875&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883111875&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84883111875

SN - 9781467344777

T3 - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013

BT - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013

T2 - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013

Y2 - 16 April 2013 through 18 April 2013

ER -