TY - GEN
T1 - Mechanical properties of few layer graphene cantilever
AU - Matsui, Kazuma
AU - Inaba, Akira
AU - Oshidari, Yuta
AU - Takei, Yusuke
AU - Takahashi, Hidetoshi
AU - Takahata, Tomoyuki
AU - Kometani, Reo
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2014/1/1
Y1 - 2014/1/1
N2 - We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.
AB - We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.
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U2 - 10.1109/MEMSYS.2014.6765834
DO - 10.1109/MEMSYS.2014.6765834
M3 - Conference contribution
AN - SCOPUS:84898983066
SN - 9781479935086
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1087
EP - 1090
BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Y2 - 26 January 2014 through 30 January 2014
ER -