MEMS mirror with slot structures suitable for flexible-grid WSS

Keisuke Sorimoto, Hitoshi Kawashima, Masahiko Mori, Toshifumi Hasama, Hiroshi Ishikawa, Hiroyuki Tsuda, Hisato Uetsuka

研究成果: Article査読

4 被引用数 (Scopus)


We propose a microelectromechanical system (MEMS) mirror design, which is suitable for use in a flexible-grid wavelength selective switch (WSS). In the flexible grid operation with a conventional MEMS-based WSS, the diffraction loss at the inter-mirror gap regions caused a large ripple in the transmission spectra. On the other hand, the newly introduced slot structures in each mirror can reduce the ripples by intentionally attenuating the light on the mirrors to equalize the reflectance of the entire mirrors. We optimize the slot structure aiming for the flexible-grid WSS operation with a bandwidth-granularity of 12.5 GHz. The ripples are successfully reduced to below 0.004 dB with a loss penalty of only 1.05 dB.

ジャーナルIEICE Electronics Express
出版ステータスPublished - 2013

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 電子工学および電気工学


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