TY - JOUR
T1 - Microstructure of diamond-like carbon films prepared by cathodic arc deposition
AU - Kimura, Ayako
AU - Azuma, Yasushi
AU - Suzuki, Tetsuya
AU - Saito, Tomohiro
AU - Ikuhara, Yuichi
N1 - Funding Information:
One of the authors (A. Kimura) gratefully acknowledgements the Sasakawa Scientific Research Grant of the Japan Science Society.
PY - 2002/7
Y1 - 2002/7
N2 - Diamond-like carbon films were synthesized under vacuum, argon, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron diffraction patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp3/sp2 ratio was measured by energy loss electron spectroscopy and X-ray photoelectron spectroscopy. The films, synthesized under hydrogen plasma, had the largest sp3/sp2 ratio, compared with those under vacuum, argon and methane circumstances.
AB - Diamond-like carbon films were synthesized under vacuum, argon, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron diffraction patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp3/sp2 ratio was measured by energy loss electron spectroscopy and X-ray photoelectron spectroscopy. The films, synthesized under hydrogen plasma, had the largest sp3/sp2 ratio, compared with those under vacuum, argon and methane circumstances.
KW - Amorphous carbon
KW - Chemical bonding
KW - Microstructure
KW - Physical vapor deposition
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U2 - 10.1016/S0925-9635(02)00046-8
DO - 10.1016/S0925-9635(02)00046-8
M3 - Article
AN - SCOPUS:0036645137
SN - 0925-9635
VL - 11
SP - 1436
EP - 1440
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 7
ER -