Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever

Physics & Astronomy

• infrared spectrometers 78%
• miniaturization 71%
• surface plasmon resonance 62%
• microelectromechanical systems 60%
• gratings 45%
• photocurrents 43%
• vibration 41%
• spectrometers 23%
• alternations 19%
• gratings (spectra) 16%
• electrical measurement 15%
• wavelengths 14%
• photometers 14%
• waveforms 13%
• incidence 12%
• energy 4%

Engineering & Materials Science

• Surface plasmon resonance 100%
• Infrared spectrometers 94%
• Photocurrents 68%
• MEMS 58%
• Spectrometers 37%
• Wavelength 27%
• Diffraction gratings 24%
• Plasmonics 23%
• Photodetectors 20%
• Infrared radiation 13%

Chemical Compounds

• Surface Plasmon Resonance 60%
• Photocurrent 43%
• Wavelength 22%
• Time 11%