Modeling of gas flow in the simulation of H"SUP -" ion source

M. Ogasawara; Y. Okuda; M. Shirai; S. Mitsuhashi; A. Hatayama

doi:10.1063/1.1146763

Modeling of gas flow in the simulation of H"SUP -" ion source

M. Ogasawara, Y. Okuda, M. Shirai, S. Mitsuhashi, A. Hatayama

研究成果: Article › 査読

4 被引用数 (Scopus)

抄録

A model of actual gas supply into the ion source is presented. Filling pressure is related to gas flow and conductance of the H"SUP -" extraction system. The rate equation for the H"SUB 2" molecule simulation of a negative outflow rates related with the filling pressure are employed in the numerical simulation of a negative hydrogen in source. With the results of numerical simulation, the H number conservation relation and pressure balance equation are shown to be inaccurate especially for higher electron temperture. (after Authors)

本文言語	English
ページ（範囲）	1082-1084
ページ数	3
ジャーナル	Review of Scientific Instruments
巻	67
号	3
DOI	https://doi.org/10.1063/1.1146763
出版ステータス	Published - 1996
外部発表	はい

ASJC Scopus subject areas

器械工学

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10.1063/1.1146763

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@article{7c65a90d4b184b25b80948a65a0c7b64,

title = "Modeling of gas flow in the simulation of H{"}SUP -{"} ion source",

abstract = "A model of actual gas supply into the ion source is presented. Filling pressure is related to gas flow and conductance of the H{"}SUP -{"} extraction system. The rate equation for the H{"}SUB 2{"} molecule simulation of a negative outflow rates related with the filling pressure are employed in the numerical simulation of a negative hydrogen in source. With the results of numerical simulation, the H number conservation relation and pressure balance equation are shown to be inaccurate especially for higher electron temperture. (after Authors)",

author = "M. Ogasawara and Y. Okuda and M. Shirai and S. Mitsuhashi and A. Hatayama",

year = "1996",

doi = "10.1063/1.1146763",

language = "English",

volume = "67",

pages = "1082--1084",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "3",

}

TY - JOUR

T1 - Modeling of gas flow in the simulation of H"SUP -" ion source

AU - Ogasawara, M.

AU - Okuda, Y.

AU - Shirai, M.

AU - Mitsuhashi, S.

AU - Hatayama, A.

PY - 1996

Y1 - 1996

N2 - A model of actual gas supply into the ion source is presented. Filling pressure is related to gas flow and conductance of the H"SUP -" extraction system. The rate equation for the H"SUB 2" molecule simulation of a negative outflow rates related with the filling pressure are employed in the numerical simulation of a negative hydrogen in source. With the results of numerical simulation, the H number conservation relation and pressure balance equation are shown to be inaccurate especially for higher electron temperture. (after Authors)

AB - A model of actual gas supply into the ion source is presented. Filling pressure is related to gas flow and conductance of the H"SUP -" extraction system. The rate equation for the H"SUB 2" molecule simulation of a negative outflow rates related with the filling pressure are employed in the numerical simulation of a negative hydrogen in source. With the results of numerical simulation, the H number conservation relation and pressure balance equation are shown to be inaccurate especially for higher electron temperture. (after Authors)

UR - http://www.scopus.com/inward/record.url?scp=0029674248&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029674248&partnerID=8YFLogxK

U2 - 10.1063/1.1146763

DO - 10.1063/1.1146763

M3 - Article

AN - SCOPUS:0029674248

SN - 0034-6748

VL - 67

SP - 1082

EP - 1084

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 3

ER -

Modeling of gas flow in the simulation of H"SUP -" ion source

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