Modification of surface properties on a nitride based coating films through mirror-quality finish grinding

K. Katahira, H. Ohmori, J. Komotori, D. Dornfeld, H. Kotani, M. Mizutani

研究成果: Article査読

5 被引用数 (Scopus)

抄録

In this study, we performed a specific precision grinding process in an attempt to improve the mirror-quality finish and tribological characteristics of titanium nitride based coating films (TiN, TiCN, and TiAIN). The ground surfaces were highly smooth with no evidence of cracking, chipping, or peeling, demonstrating that the hard coating films were finished uniformly. For the TiAIN coating, a significant high level mirror-quality finish was achieved with an average roughness Ra of 4 nm. In addition, for all films, the employed grinding process led to superior tribological characteristics. In the case of the TiN film, the precision grinding process produced a carbon- and copper-rich surface layer, as well as higher compressive residual stress.

本文言語English
ページ(範囲)593-596
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
59
1
DOI
出版ステータスPublished - 2010

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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