Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

Rihachiro Nakashima; Hidetoshi Takahashi

doi:10.1109/MEMS51670.2022.9699747

Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

Rihachiro Nakashima, Hidetoshi Takahashi

機械工学科

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports a multi-axial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The fabrication process of the proposed sensor element involves only one irradiating of each of the two types of lasers. Additionally, since the LIG cantilevers are formed on a flexible polyimide (PI) film, the cantilever can be easily kept in a standing position via thermoplastic deformation. As a result, the prototype dual axial sensor realized the measurement of normal and shear stresses with high independence.

本文言語	English
ホスト出版物のタイトル	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	688-690
ページ数	3
ISBN（電子版）	9781665409117
DOI	https://doi.org/10.1109/MEMS51670.2022.9699747
出版ステータス	Published - 2022
イベント	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan 継続期間: 2022 1月 9 → 2022 1月 13

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
巻	2022-January
ISSN（印刷版）	1084-6999

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
国/地域	Japan
City	Tokyo
Period	22/1/9 → 22/1/13

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMS51670.2022.9699747

他のファイルとリンク

引用スタイル

Nakashima, R., & Takahashi, H. (2022). Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 688-690). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51670.2022.9699747

Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film. / Nakashima, Rihachiro; Takahashi, Hidetoshi.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 688-690 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January).

研究成果: Conference contribution

Nakashima, R & Takahashi, H 2022, Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2022-January, Institute of Electrical and Electronics Engineers Inc., pp. 688-690, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 22/1/9. https://doi.org/10.1109/MEMS51670.2022.9699747

Nakashima R, Takahashi H. Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 688-690. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699747

Nakashima, Rihachiro ; Takahashi, Hidetoshi. / Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 688-690 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film",

abstract = "This paper reports a multi-axial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The fabrication process of the proposed sensor element involves only one irradiating of each of the two types of lasers. Additionally, since the LIG cantilevers are formed on a flexible polyimide (PI) film, the cantilever can be easily kept in a standing position via thermoplastic deformation. As a result, the prototype dual axial sensor realized the measurement of normal and shear stresses with high independence.",

keywords = "LIG strain gauge, Multi-axial tactile sensor, PDMS, Standing cantilever",

author = "Rihachiro Nakashima and Hidetoshi Takahashi",

note = "Funding Information: This work was partially supported by the JSPS KAKENHI under Grant 20H02102. Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

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出版物シリーズ

Conference

ASJC Scopus subject areas

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