Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model

Kotaro Haneda; Kenei Matsudaira; Hidetoshi Takahashi

doi:10.1109/MEMS49605.2023.10052249

Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model

Kotaro Haneda, Kenei Matsudaira, Hidetoshi Takahashi

機械工学科

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports a compact spherical airflow sensor using multi-MEMS differential pressure (DP) sensor elements. Three built-in MEMS sensors simultaneously measure the DP around the spherical housing structure so that the measured DPs are converted into 2D wind direction and speed. The sensor outputs are converted into wind direction and speed by neural network. We attached the calibrated sensor to a toy drone as a demonstration. Then, it was confirmed that the output corresponding to wind direction and speed was measured when a crosswind was applied during flight.

本文言語	English
ホスト出版物のタイトル	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	499-502
ページ数	4
ISBN（電子版）	9781665493086
DOI	https://doi.org/10.1109/MEMS49605.2023.10052249
出版ステータス	Published - 2023
イベント	36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 - Munich, Germany 継続期間: 2023 1月 15 → 2023 1月 19

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
巻	2023-January
ISSN（印刷版）	1084-6999

Conference

Conference	36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
国/地域	Germany
City	Munich
Period	23/1/15 → 23/1/19

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMS49605.2023.10052249

他のファイルとリンク

引用スタイル

Haneda, K., Matsudaira, K., & Takahashi, H. (2023). Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 499-502). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS49605.2023.10052249

Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model. / Haneda, Kotaro; Matsudaira, Kenei; Takahashi, Hidetoshi.
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 499-502 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January).

研究成果: Conference contribution

Haneda, K, Matsudaira, K & Takahashi, H 2023, Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model. in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2023-January, Institute of Electrical and Electronics Engineers Inc., pp. 499-502, 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023, Munich, Germany, 23/1/15. https://doi.org/10.1109/MEMS49605.2023.10052249

Haneda K, Matsudaira K, Takahashi H. Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 499-502. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS49605.2023.10052249

Haneda, Kotaro ; Matsudaira, Kenei ; Takahashi, Hidetoshi. / Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model. 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 499-502 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model",

abstract = "This paper reports a compact spherical airflow sensor using multi-MEMS differential pressure (DP) sensor elements. Three built-in MEMS sensors simultaneously measure the DP around the spherical housing structure so that the measured DPs are converted into 2D wind direction and speed. The sensor outputs are converted into wind direction and speed by neural network. We attached the calibrated sensor to a toy drone as a demonstration. Then, it was confirmed that the output corresponding to wind direction and speed was measured when a crosswind was applied during flight.",

keywords = "Airflow sensor, Differential pressure sensor, Machine learning, Neural network",

author = "Kotaro Haneda and Kenei Matsudaira and Hidetoshi Takahashi",

note = "Funding Information: This research was supported by the New Energy and Industrial Technology Development Organization (NEDO). Publisher Copyright: {\textcopyright} 2023 IEEE.; 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",

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AB - This paper reports a compact spherical airflow sensor using multi-MEMS differential pressure (DP) sensor elements. Three built-in MEMS sensors simultaneously measure the DP around the spherical housing structure so that the measured DPs are converted into 2D wind direction and speed. The sensor outputs are converted into wind direction and speed by neural network. We attached the calibrated sensor to a toy drone as a demonstration. Then, it was confirmed that the output corresponding to wind direction and speed was measured when a crosswind was applied during flight.

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BT - 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023

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Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network Model

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出版物シリーズ

Conference

ASJC Scopus subject areas

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